Experimental Verification of Squeezed - Film Damping Models for Mems
نویسندگان
چکیده
⎯ A technique for dynamic positioning of the movable electrode in an electrostatic actuator enables stable operation beyond the pull-in displacement and is used to perform squeeze-film damping measurements for different film thicknesses. Measurements at Knudsen numbers ranging between 0.03 and 0.18 are performed. Compact parallel-plate squeeze-film models are verified using the experimental results and the simulation errors are confirmed to be lower than 20%. The experiments also indicate that both rarefaction and border effects have to be included in any model.
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